A current-mode interface circuit for a piezoresistive pressure sensor
نویسندگان
چکیده
منابع مشابه
A current-mode interface circuit for a piezoresistive pressure sensor
An interfacing circuit for piezoresistive pressure sensors based on CMOS current conveyors is presented. The main advantages of the proposed interfacing circuit include the use of a single piezoresistor, the capability of offset compensation, and a versatile current-mode configuration, with current output and current or voltage input. Experimental tests confirm linear relation of output voltage...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملA High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit, which consists of an encapsulated pressure-sensitive chip, a temperature compensation circuit and a signal-conditioning circuit. A silicon on insulation (SOI) material and a standard MEMS process are used in the pressure-sensitive chip fabrication...
متن کاملLow-Voltage Current-Sensing CMOS Interface Circuit for Piezo-Resistive Pressure Sensor
ETRI Journal, Volume 29, Number 1, February 2007 A new low-voltage CMOS interface circuit with digital output for piezo-resistive transducer is proposed. An input current sensing configuration is used to detect change in piezo-resistance due to applied pressure and to allow lowvoltage circuit operation. A simple 1-bit first-order deltasigma modulator is used to produce an output digital bitstre...
متن کاملA Micromachined Piezoresistive Pressure Sensor with a Shield Layer
This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed se...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEE Transactions on Instrumentation and Measurement
سال: 1998
ISSN: 0018-9456
DOI: 10.1109/19.744332